TY - JOUR
T1 - Analytical performance of a radiofrequency-powered glow discharge excitation source associated with bias voltage modulation
AU - Wagatsuma, Kazuaki
N1 - Funding Information:
Acknowledgement The author wishes to thank Dr. K. Kitagawa for his assistance in the design of the electric circuit. This study is supported in-part by a Grant-in-Aid from the Ministry of Education of Japan (No. 09640713).
PY - 1999
Y1 - 1999
N2 - A 13.56-MHz Grimm-type glow discharge plasma on which external d.c. voltages are superimposed is investigated for the application to optical emission spectrometry. With a voltage modulation technique associated with phase-sensitive detection, the emission intensities can be measured at very low noise levels, enabling the detection power to be improved. The experimental parameters: d.c. voltage, modulation frequency, and Ar pressure, are investigated for obtaining the optimum conditions. It is possible to obtain a detection limit (Cu I 327.40 nm) of 8 × 10-4 wt.% for Cu in Fe-based alloys, while 6.6 × 10-3 wt.% in the case of conventional detection.
AB - A 13.56-MHz Grimm-type glow discharge plasma on which external d.c. voltages are superimposed is investigated for the application to optical emission spectrometry. With a voltage modulation technique associated with phase-sensitive detection, the emission intensities can be measured at very low noise levels, enabling the detection power to be improved. The experimental parameters: d.c. voltage, modulation frequency, and Ar pressure, are investigated for obtaining the optimum conditions. It is possible to obtain a detection limit (Cu I 327.40 nm) of 8 × 10-4 wt.% for Cu in Fe-based alloys, while 6.6 × 10-3 wt.% in the case of conventional detection.
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U2 - 10.1007/s002160051199
DO - 10.1007/s002160051199
M3 - Article
AN - SCOPUS:0000392062
SN - 1618-2642
VL - 363
SP - 333
EP - 338
JO - Fresenius Zeitschrift fur Analytische Chemie
JF - Fresenius Zeitschrift fur Analytische Chemie
IS - 4
ER -