TY - GEN
T1 - Argon plasma decomposition of porogen in mesoporous silica films studied by positron annihilation
AU - He, Chunqing
AU - Ito, Kenji
AU - Oka, Toshitaka
AU - Kobayashi, Yoshinori
AU - Ohdaira, Toshiyuki
AU - Suzuki, Ryoichi
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2013
Y1 - 2013
N2 - Mesoporous silica films on Si wafers were prepared via a sol-gel process using a triblock copolymer as the structural template. Spin-coated films were dried and subsequently subjected to Ar plasma treatments for decomposing the polymeric porogen. Mesopore formation in the silica film upon Ar plasma treatments was investigated by positron annihilation lifetime spectroscopy. In comparison with calcined silica film, much larger pores, more heterogeneous in size were found in silica film prepared with Ar plasma decomposition of the porogen.
AB - Mesoporous silica films on Si wafers were prepared via a sol-gel process using a triblock copolymer as the structural template. Spin-coated films were dried and subsequently subjected to Ar plasma treatments for decomposing the polymeric porogen. Mesopore formation in the silica film upon Ar plasma treatments was investigated by positron annihilation lifetime spectroscopy. In comparison with calcined silica film, much larger pores, more heterogeneous in size were found in silica film prepared with Ar plasma decomposition of the porogen.
KW - Mesoporous
KW - Plasma treatment
KW - Positron annihilation
KW - Silica film
UR - http://www.scopus.com/inward/record.url?scp=84871089518&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84871089518&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/MSF.733.193
DO - 10.4028/www.scientific.net/MSF.733.193
M3 - Conference contribution
AN - SCOPUS:84871089518
SN - 9783037855188
T3 - Materials Science Forum
SP - 193
EP - 196
BT - Positron and Positronium Chemistry X
PB - Trans Tech Publications Ltd
T2 - 10th International Workshop on Positron and Positronium Chemistry, PPC-10
Y2 - 5 September 2011 through 9 September 2011
ER -