TY - JOUR
T1 - Atom probe analysis of sputtered Co-Cr magnetic thin films
AU - Hono, K.
AU - Maeda, Y.
AU - Li, J. L.
AU - Sakurai, T.
N1 - Funding Information:
Financial support for this study from the Miyashita Research Foundation for Materials Science and the Murata Science Foundation, and a Grant-in-Aid for Scientific Research on Priority Areas (No. 02254101-5, "Metallic Aritifical Su-perlattice") from the Ministry of Education, Science and Culture, Japan, are deeply appreciated.
PY - 1993/4/2
Y1 - 1993/4/2
N2 - Both Co-22at%Cr bulk alloy and its thin films were analyzed by an atom probe field ion microscope. While no compositional inhomogeneity was found in the bulk sample, a significant compositional fluctuation was found in the Co-Cr thin film sample which was deposited on a tungsten tip surface at 200°C. The concentration of the Cr enriched region was in the range of 30-40 at% Cr, while that of the Cr depleted region was in the range of 5-10 at% Cr.
AB - Both Co-22at%Cr bulk alloy and its thin films were analyzed by an atom probe field ion microscope. While no compositional inhomogeneity was found in the bulk sample, a significant compositional fluctuation was found in the Co-Cr thin film sample which was deposited on a tungsten tip surface at 200°C. The concentration of the Cr enriched region was in the range of 30-40 at% Cr, while that of the Cr depleted region was in the range of 5-10 at% Cr.
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U2 - 10.1016/0169-4332(93)90342-9
DO - 10.1016/0169-4332(93)90342-9
M3 - Article
AN - SCOPUS:0027264329
SN - 0169-4332
VL - 67
SP - 386
EP - 390
JO - Applied Surface Science
JF - Applied Surface Science
IS - 1-4
ER -