TY - GEN
T1 - Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation
AU - Yan, Jiwang
AU - Kobayashi, Fuminori
AU - Kubo, Momoji
AU - Kuriyagawa, Tsunemoto
PY - 2012/1/1
Y1 - 2012/1/1
N2 - Pulsed laser irradiation was used to recover subsurface damage and to improve subsurface integrity of curved and micro-structured silicon surfaces. A multi-axis laser processing system was developed for laser irradiation tests. The subsurface microstructural changes due to laser irradiation were characterized by cross-sectional transmission electron microscope (XTEM). The damage recovery process was modelled using finite element (FE) and tight-binding quantum chemical molecular dynamics (TB-QCMD). The results demonstrated the possibility of generating atomic level single-crystalline structures on damaged silicon surfaces by a single laser pulse.
AB - Pulsed laser irradiation was used to recover subsurface damage and to improve subsurface integrity of curved and micro-structured silicon surfaces. A multi-axis laser processing system was developed for laser irradiation tests. The subsurface microstructural changes due to laser irradiation were characterized by cross-sectional transmission electron microscope (XTEM). The damage recovery process was modelled using finite element (FE) and tight-binding quantum chemical molecular dynamics (TB-QCMD). The results demonstrated the possibility of generating atomic level single-crystalline structures on damaged silicon surfaces by a single laser pulse.
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M3 - Conference contribution
AN - SCOPUS:84911437252
T3 - Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
SP - 372
EP - 376
BT - Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
A2 - Spaan, H.
A2 - Burke, Theresa
A2 - Shore, Paul
PB - euspen
T2 - 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Y2 - 4 June 2012 through 7 June 2012
ER -