Ball SAW device for hydrogen gas sensor

Kazushi Yamanaka, Satoru Ishikawa, Noritaka Nakaso, Nobuo Takeda, Tsuyoshi Mihara, Yusuke Tsukahara

研究成果: Conference article査読

45 被引用数 (Scopus)


We propose a novel gas sensor using surface acoustic waves (SAW) on a sphere, with a typical velocity change of 10 ppm, and sensitivity of 10 ppb. In the first implementation for hydrogen sensor, a long propagation path of 1.3 m at 41th turns of 45 MHz SAW around a 10-mm- φ quartz ball realized the propagation time as long as 403 μ s. Consequently, a sampling period of 25 ps realized relative temporal resolution of 0.06 ppm. By virtue of this high resolution, when sensing film was as thin as 20 nm, 7 ppm velocity change when exposed to 3 % hydrogen in Ar gas was precisely measured. The response time was 60s, shortest among reported SAW hydrogen sensors, due to the small Pd film thickness. We also found a SAW attenuation increase which may be used to enhance the gas selectivity.

ジャーナルProceedings of the IEEE Ultrasonics Symposium
出版ステータスPublished - 2003 12月 1
イベント2003 IEEE Ultrasonics Symposium - Proceedings - Honolulu, HI, United States
継続期間: 2003 10月 52003 10月 8

ASJC Scopus subject areas

  • 音響学および超音波学


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