Bridges buckled by film stress can generate a vertical displacement resulting in three-dimensional structures. We have demonstrated a micromirror lifted by buckled bridges and a vertical comb drive actuator. The structures show rounded profiles in a stable manner. The detailed profiles of the bridges and the lifted micromirrors are examined. The relations between the lateral design and its effect on the vertical profile and the dynamic characteristics are studied.
|ジャーナル||IEEJ Transactions on Electrical and Electronic Engineering|
|出版ステータス||Published - 2010 3月|
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