Comparison of intrinsic zero-energy loss and Shirley-type background corrected profiles of XPS spectra for quantitative surface analysis: Study of Cr, Mn and Fe oxides

Masaoki Oku, Shigeru Suzuki, Naofumi Ohtsu, Toetsu Shishido, Kazuaki Wagatsuma

研究成果: ジャーナルへの寄稿学術論文査読

34 被引用数 (Scopus)

抄録

The intrinsic zero-energy loss profiles of transition metal 2p and 3p XPS spectra for Cr, Mn, and Fe oxides are obtained by spectral deconvolution and compared with Shirley-type background corrected profiles. The metal core level spectra are deconvoluted by O 1s spectra as the response function of each oxide. As the O 1s spectra include intrinsic and extrinsic energy loss parts, the background corrected core level spectra are zero-energy loss spectra. The good agreement of the deconvoluted spectra with the reported spectra obtained by the many body effect theory indicates that the background subtraction method is accurate. A comparison of the deconvoluted with the background corrected spectra of the Shirely-type subtraction reveals that almost all the spectra coincide with each other except for Fe 3p with α-Fe2O3. The good coincidence of the Shirley-type corrected spectra with the deconvoluted and calculated spectra indicates that Shirley-type background correction can be used for daily quantitative surface analysis.

本文言語英語
ページ(範囲)5141-5148
ページ数8
ジャーナルApplied Surface Science
254
16
DOI
出版ステータス出版済み - 2008 6月 15

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