Dependence of Magnetostriction of Sputtered Tb-Fe Films on Preparation Conditions

Y. Hayashi, T. Honda, K. I. Arai, K. Ishiyama, M. Yamaguchi

研究成果: ジャーナルへの寄稿学術論文査読

51 被引用数 (Scopus)

抄録

Amorphous Tb-Fe thin films prepared by sputtering method in the compositional range TbxFe1-x(x=0-0.5) have been investigated in view of their potential for use in electromagnetic thin film actuators. We examined the magnetostriction and the coercive force for the Tb-Fe films for different sputtering conditions to obtain both soft magnetic properties and large magnetostriction in this system. As a result, we obtained Tb-Fe thin films having large magnetostrictions (180×10-6at 1kOe) and low coercive force (60–70 Oe). These films were prepared under the conditions of the composition of 45-50at%Tb, Ar gas pressure of 4mTorr, rf input power of 200W and using water cooled substrates. A trial actuator using magnetostrictive thin films is also reported.

本文言語英語
ページ(範囲)3129-3131
ページ数3
ジャーナルIEEE Transactions on Magnetics
29
6
DOI
出版ステータス出版済み - 1993 11月

フィンガープリント

「Dependence of Magnetostriction of Sputtered Tb-Fe Films on Preparation Conditions」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル