Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition

M. Katayama, K. Itaka, Y. Matsumoto, H. Koinuma

研究成果: ジャーナルへの寄稿会議記事査読

1 被引用数 (Scopus)

抄録

We have designed a compact combinatorial pulsed laser deposition (PLD) chamber as a building block of a desktop laboratory for advanced materials research. Development of small-size systems for the growth and characterization of films would greatly help in interconnecting a variety of analytical tools for rapid screening of advanced materials. This PLD chamber has four special features: (1) a drum-shaped growth chamber, (2) a waterwheel-like combinatorial masking system, (3) a multi-target system having one feedthrough, and (4) a small reflection high-energy electron diffraction (RHEED) system. The performance of this system is demonstrated by the RHEED intensity oscillation during homoepitaxial growth of SrTiO 3 as well as by simultaneous fabrication of a ternary phase diagram of rare earth-doped Y 2 O 3 phosphors.

本文言語英語
ページ(範囲)2461-2465
ページ数5
ジャーナルApplied Surface Science
252
7
DOI
出版ステータス出版済み - 2006 1月 21
イベントProceedings of the Third Japan-US Workshop on Combinatorial Material Science and Technology CMST-e SI -
継続期間: 2004 12月 72004 12月 10

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