Design and fabrication of a gradient-index phononic quartz plate lens

Tsung Tsong Wu, Meng Jhen Chiou, Yu Ching Lin, Takahito Ono

研究成果: 書籍の章/レポート/Proceedings会議への寄与査読

8 被引用数 (Scopus)

抄録

This paper presents results on the numerical and experimental studies of focusing of Lamb waves in an AT-cut quartz gradient-index phononic crystal (GRIN PC) plate lens. The band structures of square-latticed AT-cut quartz phononic crystal plates with different filling ratios are analyzed using the finite element method. The anisotropic properties of the lowest anti-symmetric Lamb mode are discussed. Then, the design of an AT-cut quartz based GRIN PC plate lens is addressed. In the micro-fabrication, the deep reactive ion etching (Deep-RIE) process with a laboratory-made etcher was utilized to fabricate the GRIN PC plate lens on an 80μm thick AT-cut quartz plate. Interdigital transducers were fabricated directly on the quartz plate to generate plate waves and a vibro-meter was used to detect the wave fields. The measured results on the focusing are in good accordance with the numerical predictions. Results of this study may serve as a basis for developing an active micro plate lens and related devices.

本文言語英語
ホスト出版物のタイトルPhotonic and Phononic Properties of Engineered Nanostructures IV
出版社SPIE
ISBN(印刷版)9780819499073
DOI
出版ステータス出版済み - 2014
イベントPhotonic and Phononic Properties of Engineered Nanostructures IV - San Francisco, CA, 米国
継続期間: 2014 2月 32014 2月 6

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
8994
ISSN(印刷版)0277-786X
ISSN(電子版)1996-756X

会議

会議Photonic and Phononic Properties of Engineered Nanostructures IV
国/地域米国
CitySan Francisco, CA
Period14/2/314/2/6

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