抄録
An 8×8 matrix relay is developed by using microsystem design and conventional machining technology. The prototype has a multilayered planar structure and 64 electromagnetic bistable switches. The system size, 28 × 32 × 7 mm, is about one tenth that of conventional relays in volume. The actuator forces generated by the spiral spring and the electro- and permanent magnets are theoretically analyzed and the results agree well with experiments. The mechanical and magnetic interference between switch actuators and the electrostatic interference between signal lines is also theoretically analyzed. The contact force is proportional to the square of the device length, the mechanical and electrical interference are independent of the length, the electrostatic interference is proportional to the length, and the limit of miniaturization is one tenth the size of the prototype.
本文言語 | English |
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ホスト出版物のタイトル | An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems |
出版社 | Publ by IEEE |
ページ | 313-318 |
ページ数 | 6 |
ISBN(印刷版) | 078031834X |
出版ステータス | Published - 1994 1月 1 |
外部発表 | はい |
イベント | Proceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn 継続期間: 1994 1月 25 → 1994 1月 28 |
Other
Other | Proceedings of the IEEE Micro Electro Mechanical Systems |
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City | Oiso, Jpn |
Period | 94/1/25 → 94/1/28 |
ASJC Scopus subject areas
- 制御およびシステム工学
- 機械工学
- 電子工学および電気工学