TY - CONF
T1 - Design and verification of an XYZ three-axis micro stage
AU - Adachi, Keisuke
AU - Sugawara, Takuma
AU - Shimizu, Yuki
AU - Chen, Yuan Liu
AU - Gao, Wei
AU - Niwa, Eiji
AU - Sasaki, Yoshihiro
N1 - Funding Information:
This work was supported by the NSK Foundation's Research Grant for Advancement of Mechatronics (2016-2017) and Japan Society for the Promotion of Science (JSPS).
PY - 2017/11/13
Y1 - 2017/11/13
N2 - This paper presents a design study of an XYZ three-axis micro stage which achieves a size of several cubic centimeters, a millimetric travel range, a nanometric driving resolution and three-axis motion at the same time. In addition, unique leaf springs acting not only as guides for a stage table but also as precision displacement sensors are included in the stage system. The XYZ three-axis micro stage is designed and fabricated. The fabricated stage is designed to have a small size of 25 mm (X) × 25 mm (Y) × 6.5 mm (Z). Furthermore, feasibility of the driving principle of the developed XYZ three-axis micro stage is verified in experiments.
AB - This paper presents a design study of an XYZ three-axis micro stage which achieves a size of several cubic centimeters, a millimetric travel range, a nanometric driving resolution and three-axis motion at the same time. In addition, unique leaf springs acting not only as guides for a stage table but also as precision displacement sensors are included in the stage system. The XYZ three-axis micro stage is designed and fabricated. The fabricated stage is designed to have a small size of 25 mm (X) × 25 mm (Y) × 6.5 mm (Z). Furthermore, feasibility of the driving principle of the developed XYZ three-axis micro stage is verified in experiments.
KW - Mechatronics
KW - Micro stage
KW - Multi-axis motion
KW - PZT actuator
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M3 - Paper
AN - SCOPUS:85041348441
T2 - 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
Y2 - 13 November 2017 through 17 November 2017
ER -