TY - JOUR
T1 - Development of a compact magnetically expanding plasma source with a strong magnetic field
AU - Takahashi, Kazunori
AU - Sato, Daiki
AU - Takaki, Koichi
AU - Ando, Akira
PY - 2013/10
Y1 - 2013/10
N2 - A compact magnetically expanding plasma source having a strong magnetic field is developed, where a pulsed solenoid current is provided by an insulated gate bipolar transistor switching circuit. The field strength is successfully increased up to ∼6 kG. The 13.56 MHz radio-frequency power with a pulse width of 28 ms and the operating argon pressure are maintained at 600 W and 3 mTorr, respectively. When the magnetic field strength is increased, the plasma density downstream of the source cavity increases due to the inhibition of cross-field diffusion and appears to saturate above ∼3.5 kG, while maintaining a plasma density of 5 × 1012 cm-3 within the source cavity.
AB - A compact magnetically expanding plasma source having a strong magnetic field is developed, where a pulsed solenoid current is provided by an insulated gate bipolar transistor switching circuit. The field strength is successfully increased up to ∼6 kG. The 13.56 MHz radio-frequency power with a pulse width of 28 ms and the operating argon pressure are maintained at 600 W and 3 mTorr, respectively. When the magnetic field strength is increased, the plasma density downstream of the source cavity increases due to the inhibition of cross-field diffusion and appears to saturate above ∼3.5 kG, while maintaining a plasma density of 5 × 1012 cm-3 within the source cavity.
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U2 - 10.1088/0963-0252/22/5/055002
DO - 10.1088/0963-0252/22/5/055002
M3 - Article
AN - SCOPUS:84885412594
SN - 1009-0630
VL - 22
JO - Plasma Science and Technology
JF - Plasma Science and Technology
IS - 5
M1 - 055002
ER -