Development of a New Solution Growth Method for AlN Single Crystals Using Type 430 Ferritic Stainless Steel Flux

研究成果: ジャーナルへの寄稿学術論文査読

抄録

The solution growth method is an economical and environmentally friendly approach to producing aluminum nitride (AlN) single crystals. However, the fluxes used in the solution growth method have low nitrogen solubility, which limits the growth rate of AlN. In this study, as part of the development of a solution growth method for AlN using Fe-Cr fluxes with high nitrogen solubility, experiments were conducted using type 430 ferritic stainless steel, which is composed mainly of Fe-Cr, as the flux. Through a series of experiments, we report the results of the optimization of various experimental growth parameters (AlN polarity, cooling rate, and growth temperature). Furthermore, a growth mechanism based on the Al:N ratio in the flux is proposed, introducing the concept of effective nitrogen content to explain how the growth temperature affects the AlN growth rate using Fe-Cr flux.

本文言語英語
ページ(範囲)5549-5558
ページ数10
ジャーナルCrystal Growth and Design
24
13
DOI
出版ステータス出版済み - 2024 7月 3

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