Effect of deposition temperature on chemical structure of lanthanum oxide/Si interface structure

H. Nohira, T. Matsuda, K. Tachi, Y. Shiino, J. Song, Y. Kuroki, Jin Aun Ng, P. Ahmet, K. Kakushima, K. Tsutsui, E. Ikenaga, K. Kobayashi, H. Iwai, T. Hattori

研究成果: Conference contribution