Effects of composition deviation of CuAl₂on BTS and TDDB reliability

Physics

• Thermal Stress 100%
• Electrical Breakdown 66%
• Reliability 50%
• Electric Potential 33%
• Annealing 16%
• Electrical Resistivity 16%
• Capacitance 16%
• Deviation 16%
• Evaluation 16%

Earth and Planetary Sciences

• Reliability 50%
• Electric Potential 33%
• Bias 33%
• Time 33%
• Electrical Resistivity 16%
• Capacitance 16%
• Annealing 16%
• Condition 16%
• Report 16%
• Deviation 16%
• Evaluation 16%

Material Science

• Stress Analysis 16%
• Interconnect 16%