Effects of process-induced mechanical stress on ESD performance

Engineering

• Mechanical Stress 100%
• Thermal Stress 20%
• Performance 20%
• Si Substrate 10%
• Applications 10%
• Fields 10%
• Simulation 10%
• Generates 10%
• Events 10%
• Requirements 10%
• Defects 10%

Material Science

• Dislocation 40%
• Oxidation Reaction 20%
• Defect 10%