TY - JOUR
T1 - Electrical properties and microstructure of lead zirconate titanate (PZT) thin films deposited by pulsed-laser deposition
AU - Wang, Zhan Jie
AU - Kokawa, Hiroyuki
AU - Maeda, Ryutaro
N1 - Funding Information:
The support of this work by a Grant-in-Aid for Scientific Research (C) (No. 14550695) from the Japanese Ministry of Education, Culture, Sports, Science and Technology is most gratefully acknowledged.
PY - 2004
Y1 - 2004
N2 - Pb(Zr0.52Ti0.48)O3 (PZT) thin films were prepared by pulsed-laser deposition (PLD) on Pt/Ti/SiO2/Si substrates and were crystallized by subsequent annealing at 750°C for 90min. Crystalline phases in the PZT films were investigated by X-ray diffraction (XRD) analysis. The microstructure and composition of the films were studied by transmission electron microscopy (TEM) and energy dispersive X-ray spectroscopy (EDS), respectively. It is found that the films consist almost entirely of the perovskite phase, but a thin layer of the pyrochlore phase exists at the surface of the films. Electrical properties of these films were evaluated by measuring P-E hysteresis loops and dielectric constants, and the effect of the microstructure on the electrical properties of the PZT thin films is discussed.
AB - Pb(Zr0.52Ti0.48)O3 (PZT) thin films were prepared by pulsed-laser deposition (PLD) on Pt/Ti/SiO2/Si substrates and were crystallized by subsequent annealing at 750°C for 90min. Crystalline phases in the PZT films were investigated by X-ray diffraction (XRD) analysis. The microstructure and composition of the films were studied by transmission electron microscopy (TEM) and energy dispersive X-ray spectroscopy (EDS), respectively. It is found that the films consist almost entirely of the perovskite phase, but a thin layer of the pyrochlore phase exists at the surface of the films. Electrical properties of these films were evaluated by measuring P-E hysteresis loops and dielectric constants, and the effect of the microstructure on the electrical properties of the PZT thin films is discussed.
KW - B. Electron microscopy
KW - Crystal structure
KW - D. PZT
KW - Ferroelectric materials
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U2 - 10.1016/j.ceramint.2003.12.118
DO - 10.1016/j.ceramint.2003.12.118
M3 - Conference article
AN - SCOPUS:4344685266
SN - 0272-8842
VL - 30
SP - 1529
EP - 1533
JO - Ceramics International
JF - Ceramics International
IS - 7
T2 - 3rd Asian Meeting on Electroceramics
Y2 - 7 December 2003 through 11 December 2003
ER -