TY - JOUR
T1 - Enhancing Delta e Effect at High Temperatures of Galfenol/Ti/Single-Crystal Diamond Resonators for Magnetic Sensing
AU - Zhang, Zilong
AU - Wu, Haihua
AU - Sang, Liwen
AU - Takahashi, Yukiko
AU - Huang, Jian
AU - Wang, Linjun
AU - Toda, Masaya
AU - Akita, Indianto Mohammad
AU - Koide, Yasuo
AU - Koizumi, Satoshi
AU - Liao, Meiyong
N1 - Funding Information:
This work was partially supported by JSPS KAKENHI (grant nos. 20H02212, 15H03999), Tsukuba Global Innovation Promotion Agency, and Nanotechnology Platform projects sponsored by the Ministry of Education, Culture, Sports, and Technology (MEXT) of Japan. The authors are grateful to the financial support from China Scholarship Council.
Publisher Copyright:
© 2020 American Chemical Society.
PY - 2020/5/20
Y1 - 2020/5/20
N2 - A conventional wisdom is that the sensing properties of magnetic sensors at high temperatures will be degraded due to the materials' deterioration. Here, the concept of high-temperature enhancing magnetic sensing is proposed based on the hybrid structure of SCD MEMS resonator functionalized with a high thermal-stable ferromagnetic galfenol (FeGa) film. The delta E effect of the magnetostrictive FeGa thin film on Ti/SCD cantilevers is investigated by varying the operating temperature from 300 to 773 K upon external magnetic fields. The multilayer structure magnetic sensor presents a high sensitivity of 71.1 Hz/mT and a low noise level of 10 nT/√Hz at 773 K for frequencies higher than 7.5 kHz. The high-temperature magnetic sensing performance exceeds those of the reported magnetic sensors. Furthermore, an anomalous behavior is observed on the delta E effect, which exhibits a positive temperature dependence with the law of Tn. Based on the resonance frequency shift of the FeGa/Ti/SCD cantilever, the strain coupling in the multilayers of the FeGa/Ti/SCD structure under a magnetic field is strengthened with increasing temperature. The delta E effect shows a strong relationship with the azimuthal angle, θ, as a sine function at 300 and 773 K. This work provides a strategy to develop magnetic sensors for high-temperature applications with performance superior to that of the present ones.
AB - A conventional wisdom is that the sensing properties of magnetic sensors at high temperatures will be degraded due to the materials' deterioration. Here, the concept of high-temperature enhancing magnetic sensing is proposed based on the hybrid structure of SCD MEMS resonator functionalized with a high thermal-stable ferromagnetic galfenol (FeGa) film. The delta E effect of the magnetostrictive FeGa thin film on Ti/SCD cantilevers is investigated by varying the operating temperature from 300 to 773 K upon external magnetic fields. The multilayer structure magnetic sensor presents a high sensitivity of 71.1 Hz/mT and a low noise level of 10 nT/√Hz at 773 K for frequencies higher than 7.5 kHz. The high-temperature magnetic sensing performance exceeds those of the reported magnetic sensors. Furthermore, an anomalous behavior is observed on the delta E effect, which exhibits a positive temperature dependence with the law of Tn. Based on the resonance frequency shift of the FeGa/Ti/SCD cantilever, the strain coupling in the multilayers of the FeGa/Ti/SCD structure under a magnetic field is strengthened with increasing temperature. The delta E effect shows a strong relationship with the azimuthal angle, θ, as a sine function at 300 and 773 K. This work provides a strategy to develop magnetic sensors for high-temperature applications with performance superior to that of the present ones.
KW - MEMS
KW - galfenol film
KW - high-temperature magnetic sensor
KW - interface coupling
KW - single-crystal diamond
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U2 - 10.1021/acsami.0c06593
DO - 10.1021/acsami.0c06593
M3 - Article
C2 - 32336083
AN - SCOPUS:85084588898
SN - 1944-8244
VL - 12
SP - 23155
EP - 23164
JO - ACS applied materials & interfaces
JF - ACS applied materials & interfaces
IS - 20
ER -