Evaluation of coplanar line type thin film magnetic field sensor with narrow slits

Masaya Sakamoto; Ryota Suzuki; Tomoya Ishihara; Junichi Honda; Shin Yabukami

doi:10.1063/9.0000575

Evaluation of coplanar line type thin film magnetic field sensor with narrow slits

Masaya Sakamoto, Ryota Suzuki, Tomoya Ishihara, Junichi Honda, Shin Yabukami

医工学研究科・医工学専攻

研究成果: Article › 査読

抄録

We have proposed coplanar line type thin-film magnetic field sensor with narrow slits. The slit is employed to flow more carrier current on the signal line by improving the impedance matching. Several sensors having 6, 10, 26, 36, and 50 μm slit widths were fabricated and evaluated from the phase and the amplitude of the transmission coefficient (S21) and reflection coefficient (S11) measured by the network analyzer. The amplitude of S21 with slit was improved about five times larger than the sensor without one at around 2 GHz. The appropriate slit width was evaluated as around 10 μm for the coplanar line type thin film magnetic field sensor and the sensitivity will enhance more than 10 times higher than the sensor without slits.

本文言語	English
論文番号	025321
ジャーナル	AIP Advances
巻	13
号	2
DOI	https://doi.org/10.1063/9.0000575
出版ステータス	Published - 2023 2月 1

ASJC Scopus subject areas

物理学および天文学（全般）

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10.1063/9.0000575

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abstract = "We have proposed coplanar line type thin-film magnetic field sensor with narrow slits. The slit is employed to flow more carrier current on the signal line by improving the impedance matching. Several sensors having 6, 10, 26, 36, and 50 μm slit widths were fabricated and evaluated from the phase and the amplitude of the transmission coefficient (S21) and reflection coefficient (S11) measured by the network analyzer. The amplitude of S21 with slit was improved about five times larger than the sensor without one at around 2 GHz. The appropriate slit width was evaluated as around 10 μm for the coplanar line type thin film magnetic field sensor and the sensitivity will enhance more than 10 times higher than the sensor without slits.",

author = "Masaya Sakamoto and Ryota Suzuki and Tomoya Ishihara and Junichi Honda and Shin Yabukami",

note = "Funding Information: This work was supported in part by Adaptable and Seamless Technology Transfer Program (A-STEP) from Japan Science and Technology Agency (JST), Ministry of Internal Affairs and Communications, Japan, and WISE Program for AI Electronics by Tohoku University. Publisher Copyright: {\textcopyright} 2023 Author(s).",

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T1 - Evaluation of coplanar line type thin film magnetic field sensor with narrow slits

AU - Sakamoto, Masaya

AU - Suzuki, Ryota

AU - Ishihara, Tomoya

AU - Honda, Junichi

AU - Yabukami, Shin

N1 - Funding Information: This work was supported in part by Adaptable and Seamless Technology Transfer Program (A-STEP) from Japan Science and Technology Agency (JST), Ministry of Internal Affairs and Communications, Japan, and WISE Program for AI Electronics by Tohoku University. Publisher Copyright: © 2023 Author(s).

PY - 2023/2/1

Y1 - 2023/2/1

N2 - We have proposed coplanar line type thin-film magnetic field sensor with narrow slits. The slit is employed to flow more carrier current on the signal line by improving the impedance matching. Several sensors having 6, 10, 26, 36, and 50 μm slit widths were fabricated and evaluated from the phase and the amplitude of the transmission coefficient (S21) and reflection coefficient (S11) measured by the network analyzer. The amplitude of S21 with slit was improved about five times larger than the sensor without one at around 2 GHz. The appropriate slit width was evaluated as around 10 μm for the coplanar line type thin film magnetic field sensor and the sensitivity will enhance more than 10 times higher than the sensor without slits.

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Evaluation of coplanar line type thin film magnetic field sensor with narrow slits

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