Fabrication of porous polyimide nanoparticles and their multilayered film

Gufan Zhao, Takayuki Ishizaka, Hitoshi Kasai, Hachiro Nakanishi

研究成果: 会議への寄与学会論文査読

抄録

Recently, porous polyimide (PI) nanoparticles have been successfully fabricated by reprecipitation method. After reprecipitation process, porous poly(amic acid) (PAA, precursor of PI) nanoparticles were obtained by using PAA solution adding other polymers as a source of pores. Then porous PI nanoparticles were fabricated by the two-step imidization of porous PAA nanoparticles without morphology transformation. Furthermore, multilayered films assembled by porous PI nanoparticles obtained were also successfully fabricated by electrodeposition method. It provides a new route to interlayer insulation films with lower dielectric constant for the prospective microelectronic applications.

本文言語英語
ページ961
ページ数1
出版ステータス出版済み - 2005
イベント54th SPSJ Annual Meeting 2005 - Yokohama, 日本
継続期間: 2005 5月 252005 5月 27

会議

会議54th SPSJ Annual Meeting 2005
国/地域日本
CityYokohama
Period05/5/2505/5/27

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