Fabricationof Al microspheres by electromigration using a metal line with a sudden change in geometrical shape

Faizul Mohammad Kamal, Yuan Li, Masumi Saka

研究成果: Article査読

1 被引用数 (Scopus)

抄録

A technique using the sudden change in the geometrical shape of an Al line is introduced for the effective accumulation of atoms and,therefore, the fabrication ofmicro materials by electromigration. The effectiveness of the present technique is verified by the formation of an Al microspherefrom a predefinedhole.According to a finite element analysis of this electrical-thermal problem, the physical mechanismgoverning the observed behaviorcan be attributed to a decrease in atomic fluxalong the electron flow direction, resulting from asudden change in geometry,in the small region surrounding the predefined hole.

本文言語English
ページ(範囲)314-318
ページ数5
ジャーナルOptoelectronics and Advanced Materials, Rapid Communications
7
3-4
出版ステータスPublished - 2013

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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