TY - JOUR
T1 - Fabricationof Al microspheres by electromigration using a metal line with a sudden change in geometrical shape
AU - Kamal, Faizul Mohammad
AU - Li, Yuan
AU - Saka, Masumi
PY - 2013
Y1 - 2013
N2 - A technique using the sudden change in the geometrical shape of an Al line is introduced for the effective accumulation of atoms and,therefore, the fabrication ofmicro materials by electromigration. The effectiveness of the present technique is verified by the formation of an Al microspherefrom a predefinedhole.According to a finite element analysis of this electrical-thermal problem, the physical mechanismgoverning the observed behaviorcan be attributed to a decrease in atomic fluxalong the electron flow direction, resulting from asudden change in geometry,in the small region surrounding the predefined hole.
AB - A technique using the sudden change in the geometrical shape of an Al line is introduced for the effective accumulation of atoms and,therefore, the fabrication ofmicro materials by electromigration. The effectiveness of the present technique is verified by the formation of an Al microspherefrom a predefinedhole.According to a finite element analysis of this electrical-thermal problem, the physical mechanismgoverning the observed behaviorcan be attributed to a decrease in atomic fluxalong the electron flow direction, resulting from asudden change in geometry,in the small region surrounding the predefined hole.
KW - Al microsphere
KW - Atomic accumulation
KW - Atomic flux
KW - Electromigration
KW - Finite element analysis
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M3 - Article
AN - SCOPUS:84878747252
SN - 1842-6573
VL - 7
SP - 314
EP - 318
JO - Optoelectronics and Advanced Materials, Rapid Communications
JF - Optoelectronics and Advanced Materials, Rapid Communications
IS - 3-4
ER -