Focused electron beam in pyroelectric electron probe microanalyzer

Susumu Imashuku; Akira Imanishi; Jun Kawai

doi:10.1063/1.4816015

Focused electron beam in pyroelectric electron probe microanalyzer

Susumu Imashuku, Akira Imanishi, Jun Kawai

研究成果: Article › 査読

9 被引用数 (Scopus)

抄録

We report a method to focus the electron beam generated using a pyroelectric crystal. An electron beam with a spot size of 100 μm was achieved by applying an electrical field to an electroconductive needle tip set on a pyroelectric crystal. When the focused electron beam bombarded a sample, characteristic X-rays of the sample were only detected due to the production of an electric field between the needle tip and the sample.

本文言語	English
論文番号	073111
ジャーナル	Review of Scientific Instruments
巻	84
号	7
DOI	https://doi.org/10.1063/1.4816015
出版ステータス	Published - 2013 7月
外部発表	はい

ASJC Scopus subject areas

器械工学

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10.1063/1.4816015

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abstract = "We report a method to focus the electron beam generated using a pyroelectric crystal. An electron beam with a spot size of 100 μm was achieved by applying an electrical field to an electroconductive needle tip set on a pyroelectric crystal. When the focused electron beam bombarded a sample, characteristic X-rays of the sample were only detected due to the production of an electric field between the needle tip and the sample.",

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AB - We report a method to focus the electron beam generated using a pyroelectric crystal. An electron beam with a spot size of 100 μm was achieved by applying an electrical field to an electroconductive needle tip set on a pyroelectric crystal. When the focused electron beam bombarded a sample, characteristic X-rays of the sample were only detected due to the production of an electric field between the needle tip and the sample.

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Focused electron beam in pyroelectric electron probe microanalyzer

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