Formation of organic-inorganic hybrid films based on silsesquioxane

The polysilsesquioxane (PSQ) is an organometallic polymer consisting of Si-O-Si cage structure and organic side chains. The PSQ has attracted much attention because of the high transparency and the excellent heat-resisting property. The purpose of our study is the functionalization of the PSQ. In this paper, we report the micropatterning of organic-inorganic films consisting of multifunctional double-decker (DD) type silsesquioxane and the polymer. The micropatterning of the film was achieved by application of the phosensitive sol-gel reaction using titanium methacrylate triisopropoxide (TMTP) and benzoyl acetone (BA). The micro-pattern with ca. 1 μm resolution was obtained by UV-irradiation through photomask on the hybrid film consisting of DD silanol, TMTP, and BA.