Hydrogen sensors using Pd-based metallic glassy alloys

Susumu Kajita; Shinichi Yamaura; Hisamichi Kimura; Kunio Yubuta; Akihisa Inoue

doi:10.1541/ieejsmas.128.225

Hydrogen sensors using Pd-based metallic glassy alloys

Susumu Kajita, Shinichi Yamaura, Hisamichi Kimura, Kunio Yubuta, Akihisa Inoue

金属材料研究所・物質創製研究部

研究成果: Article › 査読

6 被引用数 (Scopus)

抄録

Pd-based metallic glassy alloys have been investigated as materials for the hydrogen sensors. We prepared thin films of Pd-Cu-Si alloy known as typical metallic glassy alloys by r. f. magnetron sputtering method. And then, we examined their sensitivity to hydrogen by measuring the change of electric resistance of thin films when they were exposed to hydrogen gases of various concentrations at 50°C and 100°C. As a result, Pd-Cu-Si metallic glassy alloys showed excellent property as materials for the hydrogen sensors.

本文言語	English
ページ（範囲）	225-229
ページ数	5
ジャーナル	IEEJ Transactions on Sensors and Micromachines
巻	128
号	5
DOI	https://doi.org/10.1541/ieejsmas.128.225
出版ステータス	Published - 2008 12月 1

ASJC Scopus subject areas

機械工学
電子工学および電気工学

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10.1541/ieejsmas.128.225

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AU - Kajita, Susumu

AU - Yamaura, Shinichi

AU - Kimura, Hisamichi

AU - Yubuta, Kunio

AU - Inoue, Akihisa

PY - 2008/12/1

Y1 - 2008/12/1

N2 - Pd-based metallic glassy alloys have been investigated as materials for the hydrogen sensors. We prepared thin films of Pd-Cu-Si alloy known as typical metallic glassy alloys by r. f. magnetron sputtering method. And then, we examined their sensitivity to hydrogen by measuring the change of electric resistance of thin films when they were exposed to hydrogen gases of various concentrations at 50°C and 100°C. As a result, Pd-Cu-Si metallic glassy alloys showed excellent property as materials for the hydrogen sensors.

AB - Pd-based metallic glassy alloys have been investigated as materials for the hydrogen sensors. We prepared thin films of Pd-Cu-Si alloy known as typical metallic glassy alloys by r. f. magnetron sputtering method. And then, we examined their sensitivity to hydrogen by measuring the change of electric resistance of thin films when they were exposed to hydrogen gases of various concentrations at 50°C and 100°C. As a result, Pd-Cu-Si metallic glassy alloys showed excellent property as materials for the hydrogen sensors.

KW - Amorphous

KW - Hydrogen absorption

KW - Hydrogen sensor

KW - Metallic glassy alloys

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Hydrogen sensors using Pd-based metallic glassy alloys

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