Imaging detection of ethanol vapor by scanning photo-induced impedance microscopy with suspended-gate structure

Mengyun Wang, Hoang Anh Truong, Carl Frederik Werner, Ko Ichiro Miyamoto, Tatsuo Yoshinobu

研究成果: 書籍の章/レポート/Proceedings会議への寄与査読

抄録

Scanning photo-induced impedance microscopy (SPIM) is an imaging technique for the investigation of impedances on the insulating surface of a semiconductor substrate, based on the monitoring of a photocurrent signal generated by a modulated light. In this research, a gas-sensitive SPIM sensor with a suspended-gate structure is presented, to detect local impedance changes of a sensing film on the sensor surface in response to ethanol vapor. Thanks to the light-Addressability of SPIM, a spatially resolved photocurrent signal is captured and converted into 2-dimensional images for the observation of local impedance changes arising from the interaction between ethanol vapor and a SnO2 film at room temperature. Especially, the proposed gas-imaging sensor has a field-effect structure with an air gap to form a suspended-gate structure, resulting in an electrode contactless platform, which makes it possible to integrate multiple sensing elements on one single chip surface to detect gas mixtures without the need of complex wiring in the future.

本文言語英語
ホスト出版物のタイトルISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781538683279
DOI
出版ステータス出版済み - 2019 5月
イベント18th International Symposium on Olfaction and Electronic Nose, ISOEN 2019 - Fukuoka, 日本
継続期間: 2019 5月 262019 5月 29

出版物シリーズ

名前ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings

会議

会議18th International Symposium on Olfaction and Electronic Nose, ISOEN 2019
国/地域日本
CityFukuoka
Period19/5/2619/5/29

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