Improved RF integrated magnetic thin-film inductors by means of micro slits and surface planalization techniques

M. Yamaguchi, M. Baba, K. Suezawa, T. Moizumi, K. L. Arai, A. Haga, Y. Shimada, S. Tanabe, K. Ito

研究成果: ジャーナルへの寄稿会議記事査読

抄録

The application of magnetic thin-film inductors for monolithic microwave integrated circuits (MMICs) has been proposed to reduce loss generation of currently used air-core spirals in MMICs and to save their area on expensive GaAs or Si MMIC chips. However, only 8.6% enhancement has been obtained to date with the use of Fe-Al-O granular film. This article discusses major improvements of the inductance enhancement by means of micro slits and surface planarization.

本文言語英語
ページ(範囲)FQ-09
ジャーナルDigests of the Intermag Conference
出版ステータス出版済み - 2000
イベント2000 IEEE International Magnetics Conference-2000 IEEE INTERMAG - Toronto, Ont, Can
継続期間: 2000 4月 92000 4月 13

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