Improvement of AI-polar AIN layer quality by three-stage flow-modulation metalorganic chemical vapor deposition

Earth and Planetary Sciences

• Quality 100%
• Modulation 75%
• Metalorganic Chemical Vapor Deposition 75%
• X-Ray Diffraction 75%
• Improvement 50%
• Fine Structure 25%
• Ammonia 25%
• Cathodoluminescence 25%
• Model 25%
• Temperature 25%
• Time 25%
• Growth 25%
• Island 25%

Chemistry

• Flow 75%
• Metallorganic Chemical Vapor Deposition 75%
• Ammonia 25%
• Cathodoluminescence 25%
• Time 25%
• Reaction Temperature 25%
• Procedure 25%
• Surface 25%
• Crystalline Material 25%
• Primary Structure 25%

Material Science

• Surface 25%
• Crystalline Material 25%