Improvement of friction and wear properties of CVD-SiC films with new surface finishing method 'ELID-grinding'

The purpose of this investigation is to analyze the friction and wear properties of CVD-SiC films finished with ELID-grinding and conventional grinding under dry condition. Normal load is changed from 0.049N to 9.8 N, the following results are obtained: the friction coefficient of CVD-SiC films finished with two kinds of grinding method show similar results; specific wear rate of CVD-SiC films with ELID-grinding does not depend on the grinding direction; wear mode are classified into two types, powder formation (ws≧10^-9mm²/N) and without powder formation (ws≦ 3×10^-10mm²/N).;CVD-SiC films with ELID-grinding showed high wear resistance because the wear mode of powder formation did not occur when P_max is less than P_max.c.; transition between powder formation and non powder formation is explained in terms of the dimensionless parameter S_c* and transition of specific wear rate is explained in terms of the dimensionless parameter S_w*.