抄録
In order to process a semiconductor device of high quality, uniform heating is necessary, but it is not easy to heat uniformly with conventional induction heating equipment. To solve this problem, zone control induction heating equipment has been jointly developed. In this paper, we examine the effect of dividing an induction heater into several small coil groups having different current and frequency, using the finite-element method. We describe the heating characteristics of the zone control coil groups and show that nearly uniform heating is possible by controlling both current and frequency.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 292-294 |
| ページ数 | 3 |
| ジャーナル | IEEE Transactions on Magnetics |
| 巻 | 42 |
| 号 | 2 |
| DOI | |
| 出版ステータス | Published - 2006 2月 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 電子工学および電気工学