In situ monitoring of semiconductor processes using synchrotron radiation [growth and cleaning]

Physics

• Gases 50%
• Growth 50%
• Hydrogen 50%
• Molecular Beam Epitaxy 50%
• Photoelectron Spectroscopy 50%
• Photons 50%
• Semiconductor 50%
• Synchrotron Radiation 100%

Material Science

• Gas 50%
• Paper 50%
• Semiconductor Material 50%
• Surface 50%