In situ observation of chemical vapour-deposited titanium oxide films by double-modulation infrared emission spectrometry

Toshimasa Wadayama, Hiroshi Mizuseki, Aritada Hatta

研究成果: ジャーナルへの寄稿学術論文査読

4 被引用数 (Scopus)

抄録

Double-modulation infrared emission spectrometry was applied to the in situ observation of titanium oxide films grown on gold substrates from a mixture of tetraisopropoxytitanium and oxygen under controlled gaseous pressure and substrate temperature. The emission band associated with the formation of TiO bonds shifts continuously towards higher frequencies with deposition time over the range 870-920 cm-1. Structures of the films are discussed through a comparison between the observed and calculated emission spectra and by x-ray diffraction analysis. It was found that the film growth is relatively slow in the early stage of the deposition. Further, it is shown that UV illumination facilities the growth of the film. Some possibilities for this origin are discussed.

本文言語英語
ページ(範囲)239-244
ページ数6
ジャーナルVibrational Spectroscopy
2
4
DOI
出版ステータス出版済み - 1991 12月 12

フィンガープリント

「In situ observation of chemical vapour-deposited titanium oxide films by double-modulation infrared emission spectrometry」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル