Integrated micro flow control systems

Engineering

• Silicon Wafer 66%
• Flow Sensor 66%
• Fluid 66%
• Response Time 33%
• Micro Machining 33%
• Give Rise 33%
• Deposition Process 33%
• Quick Response 33%
• Integrated System 33%
• Thermal Capacity 33%
• Integration 33%
• High Sensitivity 33%
• Small Volume 33%

Earth and Planetary Sciences

• Mass Flow 100%
• Flow Control 66%
• Control System 66%
• Controller 66%
• Micromachining 33%
• Time 33%
• Gas 33%
• Volume 33%