TY - JOUR
T1 - Laser-induced vibrations of micro-beams under different boundary conditions
AU - Sun, Yuxin
AU - Fang, Daining
AU - Saka, Masumi
AU - Soh, Ai Kah
N1 - Funding Information:
The authors are grateful for the supports for this work provided by National Natural Science Foundation of China under Grants #90208002 and #90305015; the Research Grants Council of the Hong Kong Special Administrative Region, China (Project No. HKU 7195/04E); and Grant-in-Aid for Publication of Scientific Research Results (19.P07097) from the Japan Society for the Promotion of Science (JSPS).
PY - 2008/4
Y1 - 2008/4
N2 - In this study, the vibration phenomenon during pulsed laser heating of a micro-beam is investigated. The beam is made of silicon and is heated by a non-Gaussian laser beam with a pulse duration of 2 ps, which incites vibration due to the thermoelastic damping effect. The coupling between the temperature field and stress field induces energy dissipation and converts mechanical energy into heat energy, which is irreversible. An analytical-numerical technique based on the Laplace transform is used to calculate the vibration of the deflection and thermal moment. A general algorithm of the inverse Laplace transform is developed. The validation of this algorithm is obtained through comparison with numerical results obtained by the FEMLAB software package. The effect of laser pulse energy absorption depth is studied. The size effect and the effect of different boundary conditions are also analyzed. Finally, the damping ratio and resonant frequency shift ratio of beams due to the air damping effect and the thermoelastic damping effect are compared.
AB - In this study, the vibration phenomenon during pulsed laser heating of a micro-beam is investigated. The beam is made of silicon and is heated by a non-Gaussian laser beam with a pulse duration of 2 ps, which incites vibration due to the thermoelastic damping effect. The coupling between the temperature field and stress field induces energy dissipation and converts mechanical energy into heat energy, which is irreversible. An analytical-numerical technique based on the Laplace transform is used to calculate the vibration of the deflection and thermal moment. A general algorithm of the inverse Laplace transform is developed. The validation of this algorithm is obtained through comparison with numerical results obtained by the FEMLAB software package. The effect of laser pulse energy absorption depth is studied. The size effect and the effect of different boundary conditions are also analyzed. Finally, the damping ratio and resonant frequency shift ratio of beams due to the air damping effect and the thermoelastic damping effect are compared.
KW - Laplace transformation
KW - Microscale beam resonator
KW - Size effect
KW - Thermoelastic coupling
UR - http://www.scopus.com/inward/record.url?scp=38749151880&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=38749151880&partnerID=8YFLogxK
U2 - 10.1016/j.ijsolstr.2007.11.006
DO - 10.1016/j.ijsolstr.2007.11.006
M3 - Article
AN - SCOPUS:38749151880
SN - 0020-7683
VL - 45
SP - 1993
EP - 2013
JO - International Journal of Solids and Structures
JF - International Journal of Solids and Structures
IS - 7-8
ER -