Measurement range expansion of chromatic confocal probe with supercontinuum light source

Hiraku Matsukuma, Ryo Sato, Yuki Shimizu, Wei Gao

研究成果: ジャーナルへの寄稿学術論文査読

6 被引用数 (Scopus)

抄録

Confocal probes have been widely adopted in vari-ous industries owing to their depth-sectioning effects. A dual-detector differential chromatic confocal probe using a mode-locked femtosecond laser source is proposed herein, and the measurement range expansion of the probe using a supercontinuum light source is discussed. Supercontinuum light has an extremely wide spectrum. A simulation based on wave optics is performed to evaluate the detection sensitivity and measurable range by considering the chromatic aberration of the lens materials. Additionally, an experimental setup is constructed using a supercontinuum light source, and its feasibility is validated. A measurable range of 200 μm is adopted in the experi-ment, and three-dimensional surface profile measurements are performed. However, the developed confo-cal probe has not been used for surface topography measurements. Experiments are conducted to verify the performance of the developed probe.

本文言語英語
ページ(範囲)529-536
ページ数8
ジャーナルInternational Journal of Automation Technology
15
4
DOI
出版ステータス出版済み - 2021

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