MEMS integrated with silicon photonic wire waveguides

Akio Higo; Hiroshi Toshiyoshi; Hiroyuki Fujita; Yoshiaki Nakano

MEMS integrated with silicon photonic wire waveguides

Akio Higo, Hiroshi Toshiyoshi, Hiroyuki Fujita, Yoshiaki Nakano

研究成果: Paper › 査読

抄録

This paper presents design and theoretical analysis of a silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 330-nm MEMS displacement and 7.4 kHz mechanical response on a 5-um-wide and 100-um-long bridge at a voltage of 60Vpp.

本文言語	English
ページ	1465-1468
ページ数	4
出版ステータス	Published - 2009 12月 1
イベント	16th International Display Workshops, IDW '09 - Miyazaki, Japan 継続期間: 2009 12月 9 → 2009 12月 11

Other

Other	16th International Display Workshops, IDW '09
国/地域	Japan
City	Miyazaki
Period	09/12/9 → 09/12/11

ASJC Scopus subject areas

ハードウェアとアーキテクチャ
人間とコンピュータの相互作用
電子工学および電気工学
電子材料、光学材料、および磁性材料

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引用スタイル

@conference{9e3a4a729bd64dd4a89852f09ed7b077,

title = "MEMS integrated with silicon photonic wire waveguides",

abstract = "This paper presents design and theoretical analysis of a silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 330-nm MEMS displacement and 7.4 kHz mechanical response on a 5-um-wide and 100-um-long bridge at a voltage of 60Vpp.",

author = "Akio Higo and Hiroshi Toshiyoshi and Hiroyuki Fujita and Yoshiaki Nakano",

year = "2009",

month = dec,

day = "1",

language = "English",

pages = "1465--1468",

note = "16th International Display Workshops, IDW '09 ; Conference date: 09-12-2009 Through 11-12-2009",

}

TY - CONF

T1 - MEMS integrated with silicon photonic wire waveguides

AU - Higo, Akio

AU - Toshiyoshi, Hiroshi

AU - Fujita, Hiroyuki

AU - Nakano, Yoshiaki

PY - 2009/12/1

Y1 - 2009/12/1

N2 - This paper presents design and theoretical analysis of a silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 330-nm MEMS displacement and 7.4 kHz mechanical response on a 5-um-wide and 100-um-long bridge at a voltage of 60Vpp.

AB - This paper presents design and theoretical analysis of a silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 330-nm MEMS displacement and 7.4 kHz mechanical response on a 5-um-wide and 100-um-long bridge at a voltage of 60Vpp.

UR - http://www.scopus.com/inward/record.url?scp=77954166541&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77954166541&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:77954166541

SP - 1465

EP - 1468

T2 - 16th International Display Workshops, IDW '09

Y2 - 9 December 2009 through 11 December 2009

ER -

MEMS integrated with silicon photonic wire waveguides

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ASJC Scopus subject areas

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