A laser beam scanning system consisting of ascanning micro-mirror and a varifocal micro-mirror is fabricated for laser beam sensing with variable beam diameter. The scanning micro-mirror is operated under the resonant oscillation condition with an electrostatic comb-drive actuator. The varifocal micro-mirror is driven by a bending moment generated at the circumference of mirror with aparallel-palate electrostatic actuator. The scanning micromirror and the varifocal mirror are fabricated on a silicon on insulator wafer. The rotational angle of 9° at 766 Hz is obtained at the voltage of 300 V. The spot size of the laser beam is adjusted from 0.5 to 3.5 cm at the distance of 43 mby changing varifocal voltage. The proposed scanning system can be useful for several sensing techniques.
|出版ステータス||Published - 2012 4月|
ASJC Scopus subject areas