抄録
A laser beam scanning system consisting of ascanning micro-mirror and a varifocal micro-mirror is fabricated for laser beam sensing with variable beam diameter. The scanning micro-mirror is operated under the resonant oscillation condition with an electrostatic comb-drive actuator. The varifocal micro-mirror is driven by a bending moment generated at the circumference of mirror with aparallel-palate electrostatic actuator. The scanning micromirror and the varifocal mirror are fabricated on a silicon on insulator wafer. The rotational angle of 9° at 766 Hz is obtained at the voltage of 300 V. The spot size of the laser beam is adjusted from 0.5 to 3.5 cm at the distance of 43 mby changing varifocal voltage. The proposed scanning system can be useful for several sensing techniques.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 475-480 |
| ページ数 | 6 |
| ジャーナル | Microsystem Technologies |
| 巻 | 18 |
| 号 | 4 |
| DOI | |
| 出版ステータス | Published - 2012 4月 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 凝縮系物理学
- ハードウェアとアーキテクチャ
- 電子工学および電気工学