抄録
In order to fabricate microsensors, a micromachining, microfabrication technique based on LSI technologies has been used. In this paper, useful micromachining techniques are described. Examples of integrated microsensors, such as a pressure sensor including a readout circuit and a multisensor cell for blood gas analysis, are introduced. Microflow control devices, such as a microvalve and a micropump for integrated chemical analysis systems, are also described.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 21-34 |
| ページ数 | 14 |
| ジャーナル | Applied Biochemistry and Biotechnology |
| 巻 | 41 |
| 号 | 1-2 |
| DOI | |
| 出版ステータス | Published - 1993 4月 1 |
ASJC Scopus subject areas
- バイオテクノロジー
- バイオエンジニアリング
- 生化学
- 応用微生物学とバイオテクノロジー
- 分子生物学