TY - GEN
T1 - Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon
AU - Wang, Shihe
AU - Chen, Jianlin
AU - Tsukamoto, Takashiro
AU - Tanaka, Shuji
N1 - Funding Information:
This work is partly supported by a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO), and Graduate Program for Integration of Mechanical Systems (Advanced Graduate School Doctoral Fellowship).
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - This paper reports a novel mode-matched multi-ring disk resonator made on a (100) single crystal silicon. The anisotropy of the stiffness was compensated by the combination of multiple ring structures and elliptic interconnection structures. The stiffness of the interconnection structure could control the modal stiffness of whole structure. By optimizing the structural parameters, two n = 2 wineglass modes could be degenerated. The experimental results using a device fabricated by standard SOI process successfully demonstrated that the resonant frequencies were 43.807 and 43.746 kHz, which means the as-fabricated frequency mismatch was as small as only 0.14%.
AB - This paper reports a novel mode-matched multi-ring disk resonator made on a (100) single crystal silicon. The anisotropy of the stiffness was compensated by the combination of multiple ring structures and elliptic interconnection structures. The stiffness of the interconnection structure could control the modal stiffness of whole structure. By optimizing the structural parameters, two n = 2 wineglass modes could be degenerated. The experimental results using a device fabricated by standard SOI process successfully demonstrated that the resonant frequencies were 43.807 and 43.746 kHz, which means the as-fabricated frequency mismatch was as small as only 0.14%.
KW - (100) single crystal silicon
KW - Mode matching
KW - disk resonator
KW - multi-ring
UR - http://www.scopus.com/inward/record.url?scp=85126396668&partnerID=8YFLogxK
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U2 - 10.1109/MEMS51670.2022.9699445
DO - 10.1109/MEMS51670.2022.9699445
M3 - Conference contribution
AN - SCOPUS:85126396668
T3 - IEEE Symposium on Mass Storage Systems and Technologies
SP - 786
EP - 789
BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PB - IEEE Computer Society
T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Y2 - 9 January 2022 through 13 January 2022
ER -