Nanoscopic mechanism of Cu precipitation at small-angle tilt boundaries in Si

Yutaka Ohno, Kaihei Inoue, Kentaro Kutsukake, Momoko Deura, Takayuki Ohsawa, Ichiro Yonenaga, Hideto Yoshida, Seiji Takeda, Ryo Taniguchi, Hideki Otubo, Sigeto R. Nishitani, Naoki Ebisawa, Yasuo Shimizu, Hisashi Takamizawa, Koji Inoue, Yasuyoshi Nagai