抄録
We have developed a three dimensional Haasen-Alexander-Sumino model to investigate the distribution of dislocation density and residual strain in Si crystals and compared the calculation results with experimental data performed in mono-like and multicrystalline silicon ingots. The results show that the residual strain in a multicrystal is lower than in a mono-like crystal, whereas the dislocation density in the multicrystal is higher than that in the mono-like crystal. This phenomenon is due to the relation between dislocation density and residual strain caused by the difference of activated slip systems in a mono-like crystal and a multicrystal.
本文言語 | English |
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ページ(範囲) | 130-134 |
ページ数 | 5 |
ジャーナル | Journal of Crystal Growth |
巻 | 474 |
DOI | |
出版ステータス | Published - 2017 9月 15 |
外部発表 | はい |
ASJC Scopus subject areas
- 凝縮系物理学
- 無機化学
- 材料化学