TY - GEN
T1 - Optical characteristics of GaAs quantum nanodisks arrays by using neutral beam top-down process
AU - Rigo, Akio
AU - Kiba, Takayuki
AU - Tamura, Yosuke
AU - Thomas, Cedric
AU - Yamashita, Ichiro
AU - Murayama, Akihiro
AU - Samukawa, Seiji
PY - 2014/10/14
Y1 - 2014/10/14
N2 - Quantum dots (QDs) photonic devices based on III-V compound semiconductor are attractive optoelectronic devices due to their low power consumption, temperature stability, and high-speed modulation. We have developed a defect-free, top-down fabrication process for sub-20-nm-diameter GaAs quantum nanodisks (NDs) by employing a biotemplate and neutral beam etching and produced 4- and 8-nm-thick GaAs NDs embedded in an AlGaAs barrier regrown using metalorganic vapor phase epitaxy (MOVPE). The optical properties were characterized by using time-resolved photoluminescence spectroscopy. We confirmed that the emission energies and the transient behavior of the PL as a function of temperature were strongly affected by the quantum confinement effects of the NDs.
AB - Quantum dots (QDs) photonic devices based on III-V compound semiconductor are attractive optoelectronic devices due to their low power consumption, temperature stability, and high-speed modulation. We have developed a defect-free, top-down fabrication process for sub-20-nm-diameter GaAs quantum nanodisks (NDs) by employing a biotemplate and neutral beam etching and produced 4- and 8-nm-thick GaAs NDs embedded in an AlGaAs barrier regrown using metalorganic vapor phase epitaxy (MOVPE). The optical properties were characterized by using time-resolved photoluminescence spectroscopy. We confirmed that the emission energies and the transient behavior of the PL as a function of temperature were strongly affected by the quantum confinement effects of the NDs.
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U2 - 10.1109/OMN.2014.6924534
DO - 10.1109/OMN.2014.6924534
M3 - Conference contribution
AN - SCOPUS:84908031536
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 43
EP - 44
BT - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PB - IEEE Computer Society
T2 - 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Y2 - 17 August 2014 through 21 August 2014
ER -