@inproceedings{35899f91256b4a9886b485c39f6283e8,
title = "Optical scanner with deformable mirror fabricated from SOI wafer",
abstract = "An optical scanner with a deformable mirror is fabricated using SOI wafer. A lμm thick top silicon layer of SOI wafer is used to fabricate a deformable mirror. Movable comb and fixed comb are fabricated from the silicon substrate. The mirror is rotated by the comb actuator and it is also deformed by an electrostatic force independently. The rotation angle of the mirror is 12 degrees at 80V. The deformation at the mirror center is 3nm at 100V.",
keywords = "SOI wafer, Scanner, Wave front control",
author = "Takashi Sasaki and Kazuhiro Hane",
year = "2008",
month = oct,
day = "23",
doi = "10.1109/OMEMS.2008.4607846",
language = "English",
isbn = "9781424419180",
series = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",
pages = "96--97",
booktitle = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",
note = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS ; Conference date: 11-08-2008 Through 14-08-2008",
}