X-ray photoemission spectroscopy measurements have been carried out for aluminum surfaces lathed with various kinds of alcohols. Through analysis of the surface chemistry of each surface, the formation mechanism of the surface oxide layer during the lathing was clarified. All the alcohols tested in this study showed equivalently thin oxide layer on the treated surface, suggesting their possibilities for the use in ultrahigh vacuum. Validity of this suggestion was confirmed by extremely low outgassing rates and a rapid evacuation curve obtained for the ethanol-lathing or the isopropanol-lathing treated aluminum-alloy chambers.
|ジャーナル||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|出版ステータス||Published - 1992 1月|
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