抄録
This work presents Ta-doped AlN films grown on stainless steels (SUS 430) by alternative current reactive magnetron sputtering from Al and Ta targets. Also, the bimorph Ta-AlN/SUS/Ta-AlN-based energy harvester (EH) was developed for targeting low-frequency onsite ambient vibrations (below 100 Hz). Ta-AlN of 5 μm thick on SUS had a highly-(002) orientation with a rocking-curve FWHM of 3 deg. The Ta-AlN/SUS/Ta-AlN-based EH provided the output power of 1.92 mW at 1g and 84 Hz. The normalized power density (NPD) was 33.6 mW.g-2.cm-3. It is the highest among those published low-frequency energy harvesters.
| 本文言語 | English |
|---|---|
| ホスト出版物のタイトル | 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 |
| 出版社 | Institute of Electrical and Electronics Engineers Inc. |
| ページ | 154-157 |
| ページ数 | 4 |
| ISBN（電子版） | 9781665493062 |
| DOI | |
| 出版ステータス | Published - 2022 |
| イベント | 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 - Salt Lake City, United States 継続期間: 2022 12月 12 → 2022 12月 15 |
出版物シリーズ
| 名前 | 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 |
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Conference
| Conference | 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 |
|---|---|
| 国/地域 | United States |
| City | Salt Lake City |
| Period | 22/12/12 → 22/12/15 |
ASJC Scopus subject areas
- 電気化学
- コンピュータ ネットワークおよび通信
- エネルギー工学および電力技術
- 再生可能エネルギー、持続可能性、環境
- 電子工学および電気工学
- 電子材料、光学材料、および磁性材料
UN SDG
この成果は、次の持続可能な開発目標に貢献しています
