TY - JOUR
T1 - Plasma expansion from a radio frequency microdischarge
AU - Boswell, Rod
AU - Charles, Christine
AU - Alexander, Peter
AU - Dedrick, James
AU - Takahashi, Kazunori
PY - 2011/11
Y1 - 2011/11
N2 - Plasma expansion of a capacitively coupled radio frequency (13.56 MHz) argon microdischarge into a larger glass tube is studied by acquisition and analysis of high-resolution digital images. The microdischarge operating conditions are a flow of about 1.5 L/min, a pressure of 7 torr, and a power of 10 W. Interesting plume patterns can be generated, and an example of plasma striations within the plume is shown.
AB - Plasma expansion of a capacitively coupled radio frequency (13.56 MHz) argon microdischarge into a larger glass tube is studied by acquisition and analysis of high-resolution digital images. The microdischarge operating conditions are a flow of about 1.5 L/min, a pressure of 7 torr, and a power of 10 W. Interesting plume patterns can be generated, and an example of plasma striations within the plume is shown.
KW - Aerospace engineering
KW - plasma sources
UR - http://www.scopus.com/inward/record.url?scp=81255133976&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=81255133976&partnerID=8YFLogxK
U2 - 10.1109/TPS.2011.2143434
DO - 10.1109/TPS.2011.2143434
M3 - Article
AN - SCOPUS:81255133976
SN - 0093-3813
VL - 39
SP - 2512
EP - 2513
JO - IEEE Transactions on Plasma Science
JF - IEEE Transactions on Plasma Science
IS - 11 PART 1
M1 - 5771122
ER -