Plasmonic terahertz emitters with high-aspect ratio metal gratings

D. V. Lavrukhin, A. E. Yachmenev, I. A. Glinskiy, R. A. Khabibullin, M. Ryzhii, T. Otsuji, M. Shur, K. I. Zaytsev, D. S. Ponomarev

研究成果: 書籍の章/レポート/Proceedings会議への寄与査読

3 被引用数 (Scopus)

抄録

We propose a novel technology for fabricating plasmonic photoconductive antennas (PCAs) based on superlattice (SL) with increased height of the plasmonic gratings up to 100 nm. We passivate the surface of the SL by Si3N4, etch there windows and deposit Ti/Au antenna metallization. The plasmonic gratings are formed by electron-beam lithography with Ti/Au metallization followed by lift-off. Then an Al2O3 anti-reflection coating layer for reduction of the Fresnel reflection losses is used on the top of the plasmonic gratings, which also serves for maintaining its mechanical stability and providing the excitation of guided modes at the resonant wavelengths of the subwavelength slab waveguide formed by the metal gratings. Current-voltage measurements under femtosecond laser illumination reveal strong increase of the transient photocurrent generated by the fabricated plasmonic PCA which is 15 times higher than for conventional one (i.e. without the plasmonic gratings). The obtained terahertz (THz) power spectra demonstrate 100-times increase of the THz power in the plasmonic PCA. The results might be of interest to the needs of THz spectroscopy and imaging systems, in particular, operating with low-power lasers.

本文言語英語
ホスト出版物のタイトルInternational Conference on Micro- and Nano-Electronics 2018
編集者Vladimir F. Lukichev, Konstantin V. Rudenko
出版社SPIE
ISBN(電子版)9781510627093
DOI
出版ステータス出版済み - 2019
イベントInternational Conference on Micro- and Nano-Electronics 2018, ICMNE 2018 - Zvenigorod, ロシア連邦
継続期間: 2018 10月 12018 10月 5

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
11022
ISSN(印刷版)0277-786X
ISSN(電子版)1996-756X

会議

会議International Conference on Micro- and Nano-Electronics 2018, ICMNE 2018
国/地域ロシア連邦
CityZvenigorod
Period18/10/118/10/5

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