Progress and perspective of optical MEMS packaging technology

研究成果: ジャーナルへの寄稿 › 学術論文 › 査読

本文言語	英語
ページ（範囲）	558-566
ページ数	9
ジャーナル	Journal of Japan Institute of Electronics Packaging
巻	21
号	6
DOI	https://doi.org/10.5104/jiep.21.558
出版ステータス	出版済み - 2018 9月

文献へのアクセス

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title = "Progress and perspective of optical MEMS packaging technology",

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