TY - JOUR
T1 - Review on plasmas in extraordinary media
T2 - Plasmas in cryogenic conditions and plasmas in supercritical fluids
AU - Stauss, Sven
AU - Muneoka, Hitoshi
AU - Terashima, Kazuo
N1 - Funding Information:
The authors thank all present and former collaborators, members, and students of the Terashima laboratory at the University of Tokyo, whose contributions were crucial to the work presented in this review. Specifically, we would like to thank ProfessorMBaba (Saitama Medical University), DrJ-HChoi (Samsung Corp.), ProfessorFIacopi (University of Technology Sydney), ProfessorTIto (University of Tokyo), Professor HKataoka (University of Tokyo), Professor NKoshizaki (Hokkaido University), DrDLacoste (King Abdullah University of Science & Technology), DrH Miyazoe (IBM Thomas J Watson Research Center), DrYNoma (3M Corp.), DrDZPai (Unversité de Poitiers), ProfessorTSasaki (University of Tokyo), DrTSasaki (AIST), DrYShimizu (AIST), ProfessorTSuemoto (Toyota Physical and Chemical Research Institute), DrMSuzuki (Life Science Research Center, Shi-madzu Corp.), ProfessorTTomai (Tohoku University), DrKUrabe (Air Liquide Corp.), ProfessorHYui (Tokyo University of Science), and current and former graduate students: NEbato, HFujiwara, SHimeno, DIshihara, CIshii, KKatahira, SKato, TKato, HKikuchi, HKubo, SMori, SNakahara, FOshima, KSaito, NSakakibara, MSano, MSawada, TShizuno, and RYasui. Parts of the research presented in this paper were supported by Grants-in-Aid for Scientific Research (A) (Grant No. 24246120), for Specific Research on Priority Areas (Microplasma, Grant No. 15075202), and for Scientific Research on Innovative Areas (Frontier Science of Interactions between Plasmas and Nano-Interfaces, Grant No. 21110002) from the Ministry of Education, Culture, Sports, Science and Technology of Japan.
Publisher Copyright:
© 2018 IOP Publishing Ltd.
PY - 2018/2/21
Y1 - 2018/2/21
N2 - Plasma science and technology has enabled advances in very diverse fields: micro- and nanotechnology, chemical synthesis, materials fabrication and, more recently, biotechnology and medicine. While many of the currently employed plasma tools and technologies are very advanced, the types of plasmas used in micro- and nanofabrication pose certain limits, for example, in treating heat-sensitive materials in plasma biotechnology and plasma medicine. Moreover, many physical properties of plasmas encountered in nature, and especially outer space, i.e. very-low-temperature plasmas or plasmas that occur in high-density media, are not very well understood. The present review gives a short account of laboratory plasmas generated under 'extreme' conditions: at cryogenic temperatures and in supercritical fluids. The fundamental characteristics of these cryogenic plasmas and cryoplasmas, and plasmas in supercritical fluids, especially supercritical fluid plasmas, are presented with their main applications. The research on such exotic plasmas is expected to lead to further understanding of plasma physics and, at the same time, enable new applications in various technological fields.
AB - Plasma science and technology has enabled advances in very diverse fields: micro- and nanotechnology, chemical synthesis, materials fabrication and, more recently, biotechnology and medicine. While many of the currently employed plasma tools and technologies are very advanced, the types of plasmas used in micro- and nanofabrication pose certain limits, for example, in treating heat-sensitive materials in plasma biotechnology and plasma medicine. Moreover, many physical properties of plasmas encountered in nature, and especially outer space, i.e. very-low-temperature plasmas or plasmas that occur in high-density media, are not very well understood. The present review gives a short account of laboratory plasmas generated under 'extreme' conditions: at cryogenic temperatures and in supercritical fluids. The fundamental characteristics of these cryogenic plasmas and cryoplasmas, and plasmas in supercritical fluids, especially supercritical fluid plasmas, are presented with their main applications. The research on such exotic plasmas is expected to lead to further understanding of plasma physics and, at the same time, enable new applications in various technological fields.
KW - cryoplasmas
KW - electric discharges
KW - plasma processing
KW - plasmas in cryogenic conditions
KW - plasmas in supercritical fluids
KW - supercritical fluid plasmas
KW - supercritical fluids
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U2 - 10.1088/1361-6595/aaaa87
DO - 10.1088/1361-6595/aaaa87
M3 - Article
AN - SCOPUS:85043536588
SN - 0963-0252
VL - 27
JO - Plasma Sources Science and Technology
JF - Plasma Sources Science and Technology
IS - 2
M1 - 023003
ER -