TY - GEN
T1 - Safe membrane-releasing process for thermoelectric hydrogen gas sensor
AU - Houlet, L. F.
AU - Shin, W.
AU - Nishibori, M.
AU - Izu, N.
AU - Itoh, T.
AU - Matsubara, I.
PY - 2007
Y1 - 2007
N2 - We present here a safe membrane-releasing process in KOH for the fabrication of a high performance freestanding device and the mass production of a single membrane device for the hydrogen gas sensing application. The fabricated devices are thermoelectric hydrogen gas sensors based on the thermoelectric detection of the catalytic hydrogen combustion. The free-standing device has a voltage response 2.7 times higher than the single membrane device. The proposed membrane-releasing process, which combines black wax and a KOH protective polymer coat, shows fabrication yields of 31%, 50% for the free-standing device and 47% for the single-membrane device produced in mass.
AB - We present here a safe membrane-releasing process in KOH for the fabrication of a high performance freestanding device and the mass production of a single membrane device for the hydrogen gas sensing application. The fabricated devices are thermoelectric hydrogen gas sensors based on the thermoelectric detection of the catalytic hydrogen combustion. The free-standing device has a voltage response 2.7 times higher than the single membrane device. The proposed membrane-releasing process, which combines black wax and a KOH protective polymer coat, shows fabrication yields of 31%, 50% for the free-standing device and 47% for the single-membrane device produced in mass.
UR - http://www.scopus.com/inward/record.url?scp=48349090778&partnerID=8YFLogxK
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U2 - 10.1109/ICSENS.2007.4388581
DO - 10.1109/ICSENS.2007.4388581
M3 - Conference contribution
AN - SCOPUS:48349090778
SN - 1424412617
SN - 9781424412617
T3 - Proceedings of IEEE Sensors
SP - 1032
EP - 1035
BT - The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
T2 - 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Y2 - 28 October 2007 through 31 October 2007
ER -